Shigeo Kubota

Efficient all-solid state 213-nm laser source for microlithography

Minoru Takeda, Hiroshi Suganuma, Hiroki Kikuchi, 1996, Advanced Lithography.

Spectrophotometer Calibration by a Double Integrating Sphere Reference Light Source and Display Panel Measurement Using Dark Sphere

Tsutomu Shimura, Tatsuhiko Matsumoto, Shuichi Haga, 2010, IEICE Trans. Electron..

Effect of Purge Gas on the Reliability of a 266 nm Continuous-Wave Solid-State Laser

Masaki Saito, Hiroyuki Wada, Michio Oka, 2004 .

Shot-noise-limited high-power green laser for higher density optical disk systems

Shigeo Kubota, Michio Oka, 1991, Other Conferences.

A Lens Design For Optical Disk Systems

Shigeo Kubota, 1986, Other Conferences.