Nikolai L. Krasnoperov

High-aspect-ratio x-ray lithography for magnetic head fabrication

Zheng Chen, Franco Cerrina, Yuli Vladimirsky, 1998, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

Heating of x-ray masks during e-beam writing

Franco Cerrina, Yuli Vladimirsky, Olga Vladimirsky, 1999, Advanced Lithography.

E-beam-induced distortions on SiN x-ray mask membrane

Franco Cerrina, Zheng Chen, Nikolai L. Krasnoperov, 1997, Advanced Lithography.