Richard E. Novak

Evolution of Silicon Cleaning Technology Over the Last Twenty Years

Takeshi Hattori, P. Besson, Jerzy Ruzyllo, 2007, ECS Transactions.

Semiconductor cleaning technology, 1989 : proceedings of the First International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

Jerzy Ruzyllo, Insulation Division, Richard E. Novak, 1990 .

Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium

Richard E. Novak, L. Shive, 2000 .