Joy Cheng

发表

Nanoscale inhomogeneity and photoacid generation dynamics in extreme ultraviolet resist materials

John Lin, Wei-Chi Chen, Ping-Jui Wu, 2018, Advanced Lithography.

Customization and design of directed self-assembly using hybrid prepatterns

Markus Brink, Gurpreet Singh, Joy Cheng, 2015, Advanced Lithography.

Rapid directed self-assembly of Lamellar microdomains from a block copolymer containing hybrid

Charles T. Black, Myron Flickner, Joy Cheng, 2008, SPIE Advanced Lithography.

Computational aspects of optical lithography extension by directed self-assembly

Neal Lafferty, Joy Cheng, Hsinyu Tsai, 2013, Advanced Lithography.

Computational lithography platform for 193i-guided directed self-assembly

Kafai Lai, Neal Lafferty, Joy Cheng, 2014, Advanced Lithography.

Pattern transfer of directed self-assembly (DSA) patterns for CMOS device applications

Sebastian Engelmann, Joy Cheng, Michael A. Guillorn, 2013, Advanced Lithography.

Towards electrical testable SOI devices using Directed Self-Assembly for fin formation

Akiteru Ko, Hong He, Nihar Mohanty, 2014, Advanced Lithography.

Directed self-assembly defectivity assessment. Part II

Ofir Montal, Kfir Dotan, Joy Cheng, 2012, Advanced Lithography.

Self-assembling materials for lithographic patterning: overview, status, and moving forward

Joy Cheng, Ho-Cheol Kim, Daniel P. Sanders, 2010, Advanced Lithography.

Self-aligned self-assembled organosilicate line patterns of ~20nm half-pitch from block-copolymer mediated self assembly

Ying Zhang, Joy Cheng, Ho-Cheol Kim, 2007, SPIE Advanced Lithography.

Integration of polymer self-assembly for lithographic application

Joy Cheng, Linda K. Sundberg, Ho-Cheol Kim, 2008, SPIE Advanced Lithography.

Self-aligned line-space pattern customization with directed self-assembly graphoepitaxy at 24nm pitch

Markus Brink, Joy Cheng, Michael A. Guillorn, 2015, Advanced Lithography.

Progress towards the integration of optical proximity correction and directed self-assembly of block copolymers with graphoepitaxy

Neal Lafferty, Joy Cheng, Charles T. Rettner, 2012, Advanced Lithography.

Pattern transfer of directed self-assembly patterns for CMOS device applications

Sebastian Engelmann, Joy Cheng, Michael A. Guillorn, 2013 .

Directed self-assembly process implementation in a 300mm pilot line environment

Joy Cheng, Mark Somervell, Hsinyu Tsai, 2013, Advanced Lithography.

Device-oriented directed self-assembly of Lamellar microdomains from a block copolymer containing hybrid

Joy Cheng, Ho-Cheol Kim, Oun-Ho Park, 2008, SPIE Advanced Lithography.

Synthesis and Characterization of Polycarbonate-containing All-organic High-χ Block Copolymers for Directed Self-assembly

Joy Cheng, Daniel P. Sanders, Teddie Magbitang, 2015 .

Directed Self-assembly for Lithography Applications

Joy Cheng, 2010 .

Integration of Directed Self-Assembly with 193 nm Lithography

William D. Hinsberg, Joy Cheng, Matthew E. Colburn, 2010 .

Directed self-assembly for ever-smaller printed circuits

Joy Cheng, Michael A. Guillorn, Matthew E. Colburn, 2013 .

Directed Self-assembly on Sparse Chemical Patterns for Lithographic Applications

William D. Hinsberg, Alshakim Nelson, Joy Cheng, 2009 .

Development of polycarbonate-containing block copolymers for thin film self-assembly applications

Alshakim Nelson, Joy Cheng, Daniel P. Sanders, 2016 .

Directed Self-assembly of Topcoat-free, Integration-friendly High-χ Block Copolymers

Joy Cheng, Guanyang Lin, Daniel P. Sanders, 2014 .

Sub-30 nm pitch line-space patterning of semiconductor and dielectric materials using directed self-assembly

Sebastian Engelmann, Joy Cheng, Michael A. Guillorn, 2012 .

Formation of a Cobalt Magnetic Dot Array via Block Copolymer Lithography

Joy Cheng, Caroline A. Ross, Edwin L. Thomas, 2001 .