R. Miyake
发表
Y. Murakami,
Kenji Sakamoto,
Tomohiro Ishikawa,
2010
.
Jan H. J. Fluitman,
Michael Curt Elwenspoek,
Theodorus S.J. Lammerink,
1994
.
R. Miyake,
J. Fluitman,
M. Elwenspoek,
1993,
[1993] Proceedings IEEE Micro Electro Mechanical Systems.