Y. Hirai

Simulation study of SU-8 structures realized by single-step projection photolithography

O. Paul, O. Tabata, K. Nakamura, 2016, 2016 IEEE SENSORS.

X3D: 3D X-ray lithography and development simulation for MEMS

S. Hafizovic, O. Tabata, Y. Hirai, 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

Rotational motion effect on sensitivity matrix of MEMS three-axis accelerometer for realization of concurrent calibration using vibration table

K. Sugano, Y. Hirai, T. Tsuchiya, 2013, 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS).

Selective assembly of DNA nanostructure bridging onto a trenched silicon substrate

Y. Hirai, T. Tsuchiya, S. Park, 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

Validation of X-ray lithography and development simulation system for moving mask deep X-ray lithography

S. Hafizovic, O. Tabata, Y. Hirai, 2006, Journal of Microelectromechanical Systems.

Microfluidic device to interconnect multiple organs via fluidic circulation: Towards body-on-a-chip

K. Kamei, Y. Hirai, T. Tsuchiya, 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).