T. Tsuchiya
发表
O. Paul,
O. Tabata,
K. Nakamura,
2016,
2016 IEEE SENSORS.
K. Sugano,
O. Tabata,
S. Tanaka,
2007,
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.
K. Sugano,
Y. Hirai,
T. Tsuchiya,
2013,
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS).
K. Sugano,
O. Tabata,
Ahmed M. R. Fath El Bab,
2012,
Journal of Microelectromechanical Systems.
Specimen size effect on tensile strength of surface micromachined polycrystalline silicon thin films
T. Tsuchiya,
T. Tsuchiya,
Y. Taga,
1997,
Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.
T. Ikehara,
T. Tsuchiya,
T. Tsuchiya,
2012,
Journal of Microelectromechanical Systems.
Y. Hirai,
T. Tsuchiya,
S. Park,
2015,
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
O. Tabata,
T. Tsuchiya,
W. Yoshikawa,
2006,
19th IEEE International Conference on Micro Electro Mechanical Systems.
H. Funabashi,
T. Tsuchiya,
H. Funabashi,
2004,
17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.
K. Sugano,
T. Tsuchiya,
O. Tabata,
2007,
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.
K. Sugano,
O. Tabata,
M. Fujita,
2009,
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.
K. Kamei,
Y. Hirai,
T. Tsuchiya,
2015,
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
K. Sugano,
O. Tabata,
T. Tsuchiya,
2008,
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.
K. Sugano,
T. Tsuchiya,
O. Tabata,
2007,
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS).
K. Sugano,
T. Tsuchiya,
T. Tsuchiya,
2012,
Journal of Microelectromechanical Systems.