文
论文分享
演练场
杂货铺
论文推荐
字
编辑器下载
登录
注册
M. Kreitmaier
发表
Feasibility analysis of a novel production method for monolithic integrated MEMS with nanogaps
R. Weigel, A. Hagelauer, D. Hohnloser, 2016, 2016 IEEE SENSORS.