Pushkar P. Apte

Rapid thermal processing uniformity using multivariable control of a circularly symmetric 3 zone lamp

Krishna C. Saraswat, Pushkar P. Apte, 1992 .

Pyrometer modeling for rapid thermal processing

Mehrdad M. Moslehi, Krishna C. Saraswat, S. C. Wood, 1991, Other Conferences.

Demonstration of Multiprocessing by Silicon Epitaxy Following In-Situ Cleaning

Mehrdad M. Moslehi, Krishna C. Saraswat, Ramnath Venkatraman, 1991 .

Temperature Uniformity Optimization Using Three-Zone Lamp and Dynamic Control in Rapid Thermal Multiprocessor

Mehrdad M. Moslehi, Krishna C. Saraswat, S. C. Wood, 1991 .