Lynn R. Allen

Characterization of rapid thermally grown dielectrics by surface charge analysis and atomic force microscopy

John M. Grant, Lynn R. Allen, 1994, Other Conferences.

Monitoring of highly selective plasma etch processes

Greg Stecker, John M. Grant, Tzu Yen Hsieh, 1994, Advanced Lithography.

Manufacturing issues in copper chemical vapor deposition processes

Tue Nguyen, Lynn R. Allen, Sheng Teng Hsu, 1994, Advanced Lithography.

Exploitin DatabaseTechnology i! in t e Medical Arena

Ophir Frieder, Lynn R. Allen, 1992 .

Exploit in Data baseTechnology in t II e Medical Arena

Ophir Frieder, Lynn R. Allen, 1992 .

Tungsten plug etchback and substrate damage measured by atomic force microscopy

Lynn R. Allen, John M. Grant, 1995 .