Runyuan Han

Fast local registration measurements for efficient e-beam writer qualification and correction: EMLC18 Best Paper (Conference Presentation)

Klaus-Dieter Roeth, Frank Laske, Oliver Ache, 2018 .

Fast local registration measurements for efficient e-beam writer qualification and correction

Klaus-Dieter Roeth, Frank Laske, Oliver Ache, 2018, European Mask and Lithography Conference.

Enabling accurate and cost-effective registration metrology on EUVL masks

Klaus-Dieter Roeth, Frank Laske, Hendrik Steigerwald, 2018, Photomask Japan.