Hiroyuki Tanaka

发表

Probing the inner structure of a blast furnace by cosmic-ray muon radiography

Shinroku Matsuzaki, Akihiko Shinotake, Kazuya Kunitomo, 2009 .

Resist outgassing characterization based on the resist compositions and process

Soichi Inoue, Yukiko Kikuchi, Hiroyuki Tanaka, 2013, Advanced Lithography.

1502 Strain Measurement in Flip Chip Packages using the Digital Image Correlation Method and the Improvement of the FEM Analysis

Hiroyuki Tanaka, Toru Ikeda, Noriyuki Miyazaki, 2009 .

Laser-imaging diagnostics of debris behavior from laser-produced tin plasma for EUV-light sources

Yuki Hashimoto, Akihiko Takahashi, Hiroyuki Tanaka, 2007, SPIE LASE.

FORMULATION OF Gmax FROM RECONSTITUTED CLAYEY SOILS AND ITS APPLICATION TO Gmax MEASURED IN THE FIELD

Takayuki Kawaguchi, Hiroyuki Tanaka, 2008 .

Correlation study on resist outgassing between EUV and e-beam irradiation

Soichi Inoue, Yukiko Kikuchi, Takeo Watanabe, 2014, Advanced Lithography.

Overlay accuracy of EUV1 using compensation method for nonflatness of mask

Kazuya Ota, Osamu Suga, Yuusuke Tanaka, 2011, Advanced Lithography.

Excimer laser beam delivery systems for medical applications

Yuichi Hashishin, Hiroyuki Tanaka, Kazuyuki Okada, 1993, Photonics West - Lasers and Applications in Science and Engineering.

Wide-field one-shot optical polarimeter: HOWPol

Yukiko Kamata, Hiroyuki Tanaka, Satoshi Miyazaki, 2008, Astronomical Telescopes + Instrumentation.

Performance of a novel NMR apparatus with a solenoidal tape-shaped antenna and a split-type superconducting magnet

Hiroyuki Tanaka, Kenji Kawasaki, Tsuyoshi Wakuda, 2013 .

Fabrication of 35nm via-hole patterns for interconnect test chips with EUV lithography

Kazuo Tawarayama, Shunko Magoshi, Hajime Aoyama, 2010, Advanced Lithography.

Support mechanism and conveyor device and recording device

Hiroyuki Tanaka, Shinya Sonoda, Haruyuki Yanagi, 1999 .

Effect of using a resin coating on KrF chemically amplified positive resists

Akira Oikawa, Hiroyuki Tanaka, Yasunori Hatakenaka, 1993, Advanced Lithography.

COMPARATIVE STUDY ON SAMPLE QUALITY USING SEVERAL TYPES OF SAMPLERS

Pankaj Sharma, Takashi Tsuchida, Hiroyuki Tanaka, 1996 .

Contribution of EUV resist components to the non-cleanable contaminations

Soichi Inoue, Yukiko Kikuchi, Takeo Watanabe, 2014, Advanced Lithography.

Tape carrier package and its connecting method and heating and pressurizing head

Hiroyuki Tanaka, 二見利男, Toshio Futami, 1992 .

Phase synchronization circuit (PLL) in a PRML regeneration device

Hiroyuki Tanaka, Masahide Kanegae, Katutoshi Asai, 1995 .

Study of EUV outgassing spatial distribution toward witness plate in the EUV outgas tester

Soichi Inoue, Yukiko Kikuchi, Takeo Watanabe, 2013, Advanced Lithography.

Fabrication of half-pitch 32-45-nm SRAM patterns with EUVL

Kazuo Tawarayama, Shunko Magoshi, Hajime Aoyama, 2009, Advanced Lithography.

K0-consolidation in a triaxial cell and evaluation of in-situ K0 for marine clays with various characteristics

Yoichi Watabe, Takashi Tsuchida, Hiroyuki Tanaka, 2003 .

The author list of the Telescope Array Collaboration

Y. Uchihori, Hiroyuki Tanaka, Toshitsugu Fujii, 2013 .

Transmission Test Using a 42GHz-Band HDTV Digital FPU

Hiroyuki Tanaka, Hisao Nakakita, Kenji Terada, 1995 .

Vane shear strength of a Japanese marine clay and applicability of Bjerrum's correction factor

Hiroyuki Tanaka, Hiroyuki Tanaka, 1994 .

Process liability evaluation for extreme ultraviolet lithography

Takeshi Koshiba, Kazuo Tawarayama, Hajime Aoyama, 2009 .

333 Vibration Control of Flexible Space Structure

Kazuto Seto, Hiroyuki Tanaka, Katsuhiko Yoshida, 2001 .

Feasibility study on the impact of high-power EUV irradiation on key lithographic elements

Soichi Inoue, Hiroyuki Tanaka, Shinji Mikami, 2015, Advanced Lithography.

Suction and shear wave velocity measurements for assessing sample quality.

Hiroyuki Tanaka, K. Nishida, Hiroyuki Tanaka, 2007 .

Electromagnetic Field Analysis for Smart Key Antenna

Yuji Okada, Hiroyuki Tanaka, Kiyoshi Yamane, 2007 .

Experiments of Current Start-up by RF on QUEST

Akio Sanpei, Kazuo Nakamura, Hiroshi Idei, 2011 .

Resist outgassing characterization for qualification in high power EUV lithography

Soichi Inoue, Yukiko Kikuchi, Takeo Watanabe, 2012, Advanced Lithography.

J0601-4-4 Improvement of the non-linear stress analysis in electronic packages using the strain measurement with the digital image correlation method

Hiroyuki Tanaka, Toru Ikeda, Nobuyuki Shishido, 2010 .

Nonlinear optical properties of main-chain-type liquid crystalline polymers

Hiroyuki Tanaka, Tadahiro Asada, 1997, Optics & Photonics.

Applicability of extreme ultraviolet lithography to fabrication of half pitch 35nm interconnects

Kazuo Tawarayama, Hajime Aoyama, Yuusuke Tanaka, 2010, Advanced Lithography.

A Ferroelectric Gate Field Effect Transistor with a ZnO/Pb(Zr,Ti)O3 Heterostructure Formed on a Silicon Substrate

Hiroyuki Tanaka, Yukihiro Kaneko, Y. Kato, 2008 .

Overview and Future Challenge of Ferroelectric Random Access Memory Technologies

Hiroyuki Tanaka, Shinzo Koyama, Kazuhiro Kaibara, 2007 .