Palash P. Das

Low cost of ownership KrF excimer laser using a novel pulse power and chamber configuration

William N. Partlo, Richard L. Sandstrom, Igor V. Fomenkov, 1995, Advanced Lithography.

Reliability studies of 1-kHz KrF excimer lasers for DUV lithography

Igor V. Fomenkov, Ray Cybulski, Palash P. Das, 1997, Advanced Lithography.

Design considerations and performance of 1-kHz KrF excimer lasers for DUV lithography

William N. Partlo, Richard L. Sandstrom, Igor V. Fomenkov, 1996, Advanced Lithography.

Feasibility studies of operating KrF lasers at ultranarrow spectral bandwidths for 0.18-μm line widths

William N. Partlo, Thomas Hofmann, Dave Myers, 1998, Advanced Lithography.