Amrit K. Narasimhan

Electron trapping: a mechanism for acid production in extreme ultraviolet photoresists

Robert L. Brainard, Steven Grzeskowiak, Jake Kaminsky, 2018 .

Probing and repairing damaged surfaces with nanoparticle-containing microcapsules.

Amrit Narasimhan, Santanu Kundu, Todd Emrick, 2012, Nature nanotechnology.

Electronic structure, excitation properties, and chemical transformations of extreme ultra-violet resist materials

Amrit K. Narasimhan, R. Brainard, S. Rangan, 2017 .

Analytical techniques for mechanistic characterization of EUV photoresists

Amrit Narasimhan, Robert L. Brainard, Steven Grzeskowiak, 2017, Advanced Lithography.

Cross sections of EUV PAGs: influence of concentration, electron energy, and structure

Amrit Narasimhan, Leonidas E. Ocola, Mark Neisser, 2016, SPIE Advanced Lithography.

Energy deposition and charging in EUV lithography: Monte Carlo studies

Amrit Narasimhan, Leonidas E. Ocola, Mark Neisser, 2016, SPIE Advanced Lithography.

Probing and repairing damaged surfaces with nanoparticle-containing microcapsules.

Amrit K. Narasimhan, A. Balazs, T. Emrick, 2012, Nature nanotechnology.

What We Don’t Know About EUV Exposure Mechanisms

Amrit K. Narasimhan, R. Brainard, G. Denbeaux, 2017 .