Milind Weling

Effects of resist strip processing damage on the electrical characteristics of 0.8-um a-Si antifuse circuit elements

Landon B. Vines, James L. Hickey, Felix Fujishiro, 1994, Advanced Lithography.

Damage to thin gate oxide during lightly doped drain spacer oxide etching

Calvin T. Gabriel, Milind Weling, 1994 .

Minimization of chemical-mechanical planarization (CMP) defects and post-CMP cleaning

Milind Weling, S. Raghavan, Srini Raghavan, 1999 .

W-plug via integration issues

Xi-Wei Lin, S. Bothra, Dipankar Pramanik, 1997 .