Sangrae Joo

Optimal iterative learning control of wafer temperature uniformity in rapid thermal processing

Jinho Lee, Kwang Soon Lee, In Sik Chin, 2001, ISIE 2001. 2001 IEEE International Symposium on Industrial Electronics Proceedings (Cat. No.01TH8570).

Identification and Multivariable Iterative Learning Control of an RTP Process for Maximum Uniformity of Wafer Temperature

Moonki Cho, Yonghee Lee, Kwang S. Lee, 2003 .