Yoonmoon Park

Integration Technology of 30nm Generation Multi-Level NAND Flash for 64Gb NAND Flash Memory

Jangho Park, Sunghyun Kwon, Jinho Kim, 2007, 2007 IEEE Symposium on VLSI Technology.

Smallest Bit-Line Contact of 76nm pitch on NAND Flash Cell by using Reversal PR (Photo Resist) and SADP (Self-Align Double Patterning) Process

Sunghyun Kwon, Won-Seong Lee, Byungjoon Hwang, 2007, 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference.