Shunsuke Touge

EUV and debris characteristics of a laser-plasma tin-dioxide colloidal target

Shoichi Kubodera, Masanori Kaku, Masahito Katto, 2009, International Symposium on High Power Laser Systems and Applications.

Debris characteristics and mitigation of a laser plasma tin-contained liquid jet/droplet targets

Shoichi Kubodera, Masanori Kaku, Masahito Katto, 2009, Advanced Lithography.