Kunihiro Hosono

Novel process for phase-shifting mask fabrication

Nobuyuki Yoshioka, Yaichiro Watakabe, Maaike Op de Beeck, 1992, Advanced Lithography.

Novel Technique for Phase-Shifting-Mask Repair Using Focused-Ion-Beam Etch-Back Process

Nobuyuki Yoshioka, Yoichi Akasaka, Yaichiro Watakabe, 1992 .

Fabrication of surface acoustic wave devices by using x‐ray lithography

Hiroaki Morimoto, Nobuyuki Yoshioka, Yaichiro Watakabe, 1989 .

Photomask and Next-Generation Lithography Mask Technology XVII

Kunihiro Hosono, K. Hosono, 2009 .