H. Fukuda

Silicon photonics devices for metro applications

Koji Takeda, Kentaro Honda, H. Fukuda, 2017, OPTO.

Si wire waveguide devices

Toshifumi Watanabe, Seiichi Itabashi, Hiroyuki Shinojima, 2007, SPIE Optics East.

Ultra-high efficiency III-V on Si MOS capacitor Mach-Zehnder modulator

S. Matsuo, T. Kakitsuka, T. Fujii, 2018, SPIE/COS Photonics Asia.

Topographic and chemical control of cells' configuration on micro-patterned scaffold chips with aligned beads

T. Ichiki, H. Fukuda, K. Takahashi, 2005 .

Impact of long-period line-edge roughness (LER) on accuracy in critical dimension (CD) measurement and a new guideline for cd metrology

H. Kawada, H. Fukuda, A. Ywiaguechi, 2004, Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004..

Fully CMOS compatible on-LSI capacitive pressure sensor fabricated using standard back-end-of-line processes

N. Yokoyama, H. Fukuda, T. Fujimori, 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

Node connection/quantum phase-shifting mask-path to below 0.3-/spl mu/m pitch, proximity effect free random interconnect and memory patterning

H. Fukuda, 1999, 1999 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.99CH36325).

Analysis of line edge roughness using probability process model for chemically amplified resists

H. Fukuda, 2002, 2002 International Microprocesses and Nanotechnology Conference, 2002. Digest of Papers..