A Stoffel

发表

The slot microphone, a new microphone excitation concept

Bernhard Müller, A Stoffel, Zd Škvor, 1999 .

LPCVD against PECVD for micromechanical applications

Wolfgang Kronast, Bernhard Müller, A Stoffel, 1996 .

Fabrication of single-chip polysilicon condenser structures for microphone applications

A Stoffel, A Kovacs, 1995 .

Single-chip condenser microphone using porous silicon as sacrificial layer for the air gap

Bernhard Müller, A Stoffel, W. Kronast, 2001 .

Silicon membrane condenser microphone with integrated field-effect transistor

E. Graf, A Stoffel, W. Kronast, 1993 .

Mechanical analysis of polycrystalline and single-crystalline silicon microstructures

A Stoffel, A. Kovacs, 1994 .

A miniaturized single-chip silicon membrane microphone with integrated field-effect transistor

Wolfgang Kronast, Bernhard Müller, A Stoffel, 1996 .