Manabu Tomita

Monitoring test structure for plasma process induced charging damage using charge-based capacitance measurement (PID-CBCM)

Hidetoshi Ohnuma, Tsuyoshi Suzuki, Shigetaka Mori, 2015, Proceedings of the 2015 International Conference on Microelectronic Test Structures.

Highly effective and versatile test structure for evaluating dielectric properties using flexible pulse generator on chip

Hidetoshi Ohnuma, Tsuyoshi Suzuki, Ken Sawada, 2016, 2016 International Conference on Microelectronic Test Structures (ICMTS).

Monitoring Test Structure for Plasma Process-Induced Charging Damage Using Charge-Based Capacitance Measurements

Hidetoshi Ohnuma, Shigetaka Mori, Yuzo Fukuzaki, 2016, IEEE Transactions on Semiconductor Manufacturing.