R. Korlahalli
发表
Syed H. Masood,
R. Korlahalli,
2004
.
Weidong Yang,
Wei Liu,
R. Lowe-Webb,
2002,
13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259).
R. Lowe-Webb,
R. Korlahalli,
H. Sasano,
2004,
IEEE Transactions on Semiconductor Manufacturing.