Vladimir Vaganov

System approach to MEMS commercialization

Vladimir Vaganov, 2002, SPIE/OSA/IEEE Asia Communications and Photonics.

Silicon micro-optical scanner

Masaru Takeuchi, Norihiro Asada, Nickolai Belov, 2000 .

Silicon-on-insulator (SOI) structures for pressure sensors

Vladimir Vaganov, Eugene I. Givargizov, Alexander B. Limanov, 1991 .

Construction problems in sensors

Vladimir Vaganov, V. Vaganov, 1991 .