T. Tojo

Piezoelectric driven turnable with high positioning accuracy

T. Tojo, K. Sugihara, 1985 .

Piezoelectric-driven turntable with high positioning accuracy (2nd report) ― Reliability of piezoelectric-driven turntable

T. Tojo, K. Sugihara, Susumu Saito, 1990 .

High-Speed Convolution System For Real-Time Proximity Effect Correction

T. Tojo, T. Takigawa, T. Abe, 1998, Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135).

Novel piezoelectric-driven XYθ wafer table for an electron beam image projector

T. Tojo, Ichiro Mori, Toshiaki Shinozaki, 1985 .