Bernd Hillerich

Aberration-induced coupling loss of microlenses used for LDs and LEDs to single-mode fiber coupling

Bernd Hillerich, 1988 .

Acoustic Alignment of Loudspeaker Drivers by a Nonsymmetrical Crossovers of Different Orders

Bernd Hillerich, 1989 .

Surface-micromachined electrostatic microrelay

Bernd Hillerich, Frank Kozlowski, Ignaz Schiele, 1998 .

Dynamikmeßverfahren für Abstandssensoren

Bernd Hillerich, Matthias Schoch, Axel Hatwig, 1996 .

Efficient design and optimization of MEMS by integrating commercial simulation tools

Oliver Nagler, Bernd Hillerich, Frank Kozlowski, 1998 .

Comparison of lateral and vertical switches for application as microrelays

Bernd Hillerich, Ignaz Schiele, Ignaz Schiele, 1999 .

Micromechanical relay with electrostatic actuation

Bernd Hillerich, Frank Kozlowski, Ignaz Schiele, 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).