H. A. C. Tilmans

Challenges of monolithic integration for SiGe MEMS technology

S. Severi, A. Ray Chaudhuri, P. Helin, 2016, 2016 IEEE SENSORS.

FEM simulation and measurement validation of a cMUT cell

B. Nauwelaers, X. Rottenberg, V. Rochus, 2014, 2014 15th International Conference on Thermal, Mechanical and Mulit-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE).

MEMS near-DC to RF capacitive series switches

W. De Raedt, B. Nauwelaers, X. Rottenberg, 2003, 2003 33rd European Microwave Conference, 2003.

B-field characterization and equivalent circuit modeling of a poly-SiGe-MEMS based Xylophone Bar Magnetometer

X. Rottenberg, U. S. Mohammed, V. Rochus, 2014, 2014 15th International Conference on Thermal, Mechanical and Mulit-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE).

Consistent analytical model for single and dual thickness capacitive Micromachined Ultrasound Transducers (cMUT)

X. Rottenberg, P. Czarnecki, H. A. C. Tilmans, 2012, 2012 13th International Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems.