S. Maung

Integration of in situ spectral ellipsometry with MMST machine control

Steven A. Henck, S. W. Butler, Stephanie W. Butler, 1994 .

Software integration of in-situ spectroscopic ellipsometry

Walter M. Duncan, Steven A. Henck, S. Maung, 1994, Other Conferences.

Practical use of an in-line vacuum metrology cluster in a minifactory environment

Walter M. Duncan, Steven A. Henck, Phillip Chapados, 1994, Other Conferences.

Sensor integration into plasma etch reactors of a developmental pilot line

Amy Unruh, P. K. Mozumder, Jerry A. Stefani, 1994 .

Intelligent model‐based control system employing in situ ellipsometry

Jerry A. Stefani, Steven A. Henck, Stephanie W. Butler, 1994 .