James S. Clarke
发表
Linewidth roughness and cross-sectional measurements of sub-50 nm structures with CD-SAXS and CD-SEM
Wen-li Wu,
Eric K. Lin,
Benjamin Bunday,
2008,
SPIE Advanced Lithography.
John J. Plombon,
James S. Clarke,
Sarah L.T. Jones,
2015,
1609.06160.
Christopher George,
James S. Clarke,
Christopher Jezewski,
2014,
2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers.
James S. Clarke,
L. DiCarlo,
C. C. Bultink,
2018
.
James S. Clarke,
Gian Giacomo Guerreschi,
Sonika Johri,
2018,
Quantum Science and Technology.
Bryan J. Rice,
Wen-li Wu,
Eric K. Lin,
2007,
SPIE Advanced Lithography.
Sonika Johri,
James S. Clarke,
M. A. Rol,
2020,
IEEE Transactions on Quantum Engineering.
James S. Clarke,
Guojing Zhang,
Manish Chandhok,
2009,
Advanced Lithography.
Wen-li Wu,
Eric K. Lin,
Benjamin Bunday,
2008,
SPIE Advanced Lithography.
James S. Clarke,
Christopher Celaya,
2014
.