Hua Song

Photoresist 3D profile related etch process simulation and its application to full chip etch compact modeling

Lan Luan, Cheng-En Wu, Wayne Yang, 2015, Advanced Lithography.

Mask compensation for process flare in 193nm very low k1 lithography

Donggyu Yim, Sung-Woo Lee, Kevin Lucas, 2013, Advanced Lithography.

Study on the Stress Variation Mechanism for the Rails under the Wheels Repeated Rolling Effects

Wei Li, Hua Song, Lin Bang Song, 2014 .

Investigation of bio-ethanol steam reforming over cobalt-based catalysts

Umit S. Ozkan, Hua Song, Lingzhi Zhang, 2007 .

Fluoride concentration controlled TiO2 nanotubes: the interplay of microstructure and photocatalytic performance

Yudong Huang, Flemming Besenbacher, Hua Song, 2016 .

Preparation of composite TiO2–Al2O3 supported nickel phosphide hydrotreating catalysts and catalytic activity for hydrodesulfurization of dibenzothiophene

Min Dai, Hua Song, M. Dai, 2012 .

Economic analysis of hydrogen production through a bio-ethanol steam reforming process: Sensitivity analyses and cost estimations

Umit S. Ozkan, Hua Song, U. Ozkan, 2010 .