Yi-Ping Liu

Fabrication of defect-free full-field pixelated phase mask

Andrew Jamieson, Wen-Hao Cheng, Jeff Farnsworth, 2008, SPIE Advanced Lithography.

Alternating phase shift mask technology for 65nm logic applications

Jian Ma, Wen-Hao Cheng, Jeff Farnsworth, 2006, SPIE Advanced Lithography.