K. Mima

Low density targets for laser-produced-plasma (LPP) extreme ultraviolet light source with high-CE and toward high-repletion supply

Noriaki Miyanaga, Hiroaki Nishimura, Keiji Nagai, 2008, SPIE Advanced Lithography.

Advanced laser-produced EUV light source for HVM with conversion efficiency of 5-7% and B-field mitigation of ions

Hiroaki Nishimura, Yoshinori Shimada, Keiji Nagai, 2008, SPIE Advanced Lithography.