Motohiro Takahashi

On-Machine Optical Surface Profile Measuring System for Nano-Machining

Kimiyuki Mitsui, Hayato Yoshioka, Hidenori Shinno, 2011, Int. J. Autom. Technol..

A Newly Developed Long-Stroke Vertical Nano-Motion Platform with Gravity Compensator

Hayato Yoshioka, Hidenori Shinno, Motohiro Takahashi, 2008 .

Compact maglev stage system for nanometer-scale positioning

Hironori Ogawa, Motohiro Takahashi, Kato Takanori, 2020 .