Corbet S. Johnson

Using Atomic Force Microscopy for Deep-Submicron Failure Analysis

Jien-Chung Lo, William D. Armitage, Corbet S. Johnson, 2001, IEEE Des. Test Comput..

Heterogeneous Integration of a 300mm Silicon Photonics-CMOS Wafer Stack by Direct Oxide Bonding and Via-last 3D Interconnection

Corbet S. Johnson, E. Timurdogan, M. Watts, 2015 .

Physical Analysis of VO2 Films Grown by Atomic Layer Deposition and RF Magnetron Sputtering

Corbet S. Johnson, H. Baumgart, T. Adam, 2014 .

Engineering of niobium surfaces through accelerated neutral atom beam technology for quantum applications

Satyavolu S. Papa Rao, Corbet S. Johnson, J. Mucci, 2023, Journal of Applied Physics.

Copper Encapsulated Ultra-Thin NbN Films and Damascene Structures on 300 mm Si Wafers

Satyavolu S. Papa Rao, Corbet S. Johnson, J. Mucci, 2023, IEEE Transactions on Applied Superconductivity.

Ultrathin TaN Damascene Nanowire Structures on 300-mm Si Wafers for Quantum Applications

Satyavolu S. Papa Rao, Corbet S. Johnson, J. Mucci, 2023, IEEE Transactions on Quantum Engineering.