Toshiyuki Morikaku

J161011 Finite element analysis for driving characteristics of a polymer-MEMS mirror driven attractive force

Hidekuni Takao, Kyohei Terao, Takaaki Suzuki, 2013 .

Influences of pretreatment and hard baking on the mechanical reliability of SU-8 microstructures

Masatoshi Inoue, Fumikazu Oohira, Takuya Miura, 2013 .