Peter Frach

Precision coating on an industrial scale: requirements, technologies, equipment

Hagen Bartzsch, W. Schönberger, Peter Frach, 2015 .

Silicon oxynitride rugate filters grown by reactive pulse magnetron sputtering

Hagen Bartzsch, Klaus Goedicke, Stephan Lange, 2004, SPIE Optical Systems Design.

Influence of process parameters on properties of piezoelectric AlN and AlScN thin films for sensor and energy harvesting applications

Hagen Bartzsch, Gerald Gerlach, Gunnar Suchaneck, 2015, Microtechnologies for the New Millennium.

Sputter deposition of stress controlled piezoelectric AlN and AlScN films for ultrasonic and energy harvesting applications

Hagen Bartzsch, Stephan Barth, Susan Walter, 2013, 2013 IEEE International Ultrasonics Symposium (IUS).

Sputter deposition of silicon oxynitride gradient and multilayer coatings.

Hagen Bartzsch, Peter Frach, P. Frach, 2008, Applied optics.

Graded refractive index layer systems for antireflective coatings and rugate filters deposited by reactive pulse magnetron sputtering

Hagen Bartzsch, Klaus Goedicke, Stephan Lange, 2004 .

Pulse magnetron sputtering in a reactive gas mixture of variable composition to manufacture multilayer and gradient optical coatings

Hagen Bartzsch, Klaus Goedicke, Stephan Lange, 2006 .