Christoph Schaeffel

Next-generation test equipment for micro-production

Uwe Zeitner, Malgorzata Kujawinska, Sylwester Bargiel, 2010, Photonics Europe.

Optical, mechanical, and electro-optical design of an interferometric test station for massive parallel inspection of MEMS and MOEMS

Malgorzata Kujawinska, Kay Gastinger, Michal Jozwik, 2009, Optical Metrology.

An interferometric test station for massive parallel inspection of MEMS and MOEMS

Malgorzata Kujawinska, Kay Gastinger, Michal Jozwik, 2009 .

Magnetic Levitating System with 6 DOF

Christian Rudolf, Michael Katzschmann, Christopher Mock, 2013 .