M. E. Simon

Optical MEMS devices for telecom systems

Jian Liu, David J. Bishop, Dennis S. Greywall, 2003, SPIE Microtechnologies.

Corrections to “Design and Modeling of Membrane-Based Evaporative Cooling Devices for Thermal Management of High Heat Fluxes” [Jul 16 1056-1065]

Banafsheh Barabadi, Evelyn N. Wang, Daniel F. Hanks, 2019 .

MEMS mirror array for a wavelength-selective 1xK switch

Raymond A. Cirelli, William M. Mansfield, Dan M. Marom, 2003, SPIE Microtechnologies.

Design for reliability of MEMS/MOEMS for lightwave telecommunications

Suresh Goyal, Herbert Shea, Vladimir A. Aksyuk, 2002, The 15th Annual Meeting of the IEEE Lasers and Electro-Optics Society.

Enabling science and technology

Nagesh R. Basavanhally, Roland Ryf, Flavio Pardo, 2009 .

On the road to reliable MEMS

Herbert Shea, Flavio Pardo, Vladimir A. Aksyuk, 2003, The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, 2003. LEOS 2003..

Drift-Free, 1000 G mechanical shock tolerant single-crystal silicon two-axis MEMS tilting mirrors in a 1000/spl times/1000-port optical crossconnect

Herbert Shea, Flavio Pardo, Vladimir A. Aksyuk, 2003, OFC 2003 Optical Fiber Communications Conference, 2003..

Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators

J. F. Miner, J. E. Bower, Raymond A. Cirelli, 2007 .

Monolithic integration of MEMS-based phase shifters and optical waveguides in silicon-on-insulator

Ho Bun Chan, A. Wong-Foy, M. E. Simon, 2004 .

MEMS thermal imager with optical readout

Nagesh R. Basavanhally, J. F. Miner, J. E. Bower, 2009 .

Spatial light modulator for maskless optical projection lithography

Nagesh R. Basavanhally, J. F. Miner, J. E. Bower, 2006 .