K. Teffeau

Optical MEMS devices for telecom systems

Jian Liu, David J. Bishop, Dennis S. Greywall, 2003, SPIE Microtechnologies.

Pattern placement correction methodology for 200 mm SCALPEL masks

Michael J. Lercel, William J. Dauksher, Myrtle I. Blakey, 2001 .

High-dynamic range channelized MEMS equalizing filter

S. Chandrasekhar, S.H. Oh, A. Gasparyan, 2002, Optical Fiber Communication Conference and Exhibit.

Scalable wavelength-selective crossconnect switch based on MEMS and planar waveguides

C. Nuzman, R. Frahm, R. Ryf, 2001, Proceedings 27th European Conference on Optical Communication (Cat. No.01TH8551).

Multi-service optical node based on low-loss MEMS optical crossconnect switch

C. Nuzman, R. Frahm, R. Ryf, 2002, Optical Fiber Communication Conference and Exhibit.