Masato Higuchi

Demodulation for sinusoidal frequency/phase modulation interferometer using artificial harmonic series signal and phase-locked loop

Dong Wei, Masato Aketagawa, Masato Higuchi, 2019, Optical Metrology.

Spindle error motion measurement using concentric circle grating and sinusoidal frequency-modulated semiconductor lasers

Thanh-Tung Vu, Masato Aketagawa, Masato Higuchi, 2016, SPIE/COS Photonics Asia.

Phase determination method for sinusoidal frequency/phase modulation displacement measuring interferometer

Dong Wei, Masato Aketagawa, Masato Higuchi, 2018, SPIE/COS Photonics Asia.