B. Wenk

Surface Micromachined Accelerometer with Increased Working Capacitance and Force Feedback Operation

W. Riethmuller, J. Ramos-Martos, P. Lange, 1995, ESSDERC '95: Proceedings of the 25th European Solid State Device Research Conference.

MEMS switches and other RF components fabricated using CMOS postprocess compatible surface micromachining

B. Wenk, P. Ericsson, M. Hedstrom, 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).