F. Michel

Mechatronic micro devices

F. Michel, W. Ehrfeld, 1999, MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478).

A comparison between micromachined pressure sensors using quartz or silicon vibrating beams

G. Delapierre, J. S. Danel, Bernard Diem, 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.