M. C. Blüm

Imaging breakdown spots in SiO/sub 2/ films and MOS devices with a conductive atomic force microscope

Marc Porti, Montserrat Nafría, X. Aymerich, 2002 .

Atomic force microscope topographical artifacts after the dielectric breakdown of ultrathin SiO2 films

Marc Porti, Xavier Aymerich, Montserrat Nafría, 2003 .

Breakdown-induced negative charge in ultrathin SiO2 films measured by atomic force microscopy

Marc Porti, Xavier Aymerich, Montserrat Nafría, 2002 .