Peter A. Rosenthal

Compact FTIR wafer-state sensors: a new way of in-line ULSI characterization

Victor A. Yakovlev, Sylvie Bosch-Charpenay, Matthew Richter, 1998, Advanced Lithography.

FTIR based nondestructive method for metrology of depths in poly silicon-filled trenches

Peter A. Rosenthal, Shoaib H. Zaidi, George Stojakovic, 2003, SPIE Advanced Lithography.

Characterization of Si-on-insulator buried layers by FTIR and scatterometry

Victor A. Yakovlev, Sylvie Bosch-Charpenay, Peter A. Rosenthal, 2000, SPIE Optics + Photonics.

FT-IR reflectance spectroscopy control of SIMOX structures

Victor A. Yakovlev, Peter A. Rosenthal, Peter R. Solomon, 1998, 1998 IEEE International SOI Conference Proceedings (Cat No.98CH36199).

FTIR reflectance characterization of SIMOX buried oxide layers

Victor A. Yakovlev, Sylvie Bosch-Charpenay, Peter A. Rosenthal, 1998, Optics & Photonics.

FTIR process monitoring of metal powder temperature and size distribution

Peter A. Rosenthal, Peter R. Solomon, Philip W. Morrison, 1995, Other Conferences.

EXHAUST GAS MONITORING : NEW WINDOW INTO SEMICONDUCTOR PROCESSING

Matthew Richter, Peter A. Rosenthal, Peter R. Solomon, 1999 .

FTIR dosimetry mapping of as-implanted SIMOX wafers

Victor A. Yakovlev, Peter A. Rosenthal, M. J. Anc, 2001, 2001 IEEE International SOI Conference. Proceedings (Cat. No.01CH37207).

Real-time etch-depth measurements of MEMS devices

Sylvie Bosch-Charpenay, Peter A. Rosenthal, Peter R. Solomon, 2002 .

Model‐Based Infrared Metrology for Advanced Technology Nodes and 300 mm Wafer Processing

Peter A. Rosenthal, Ulrich Mantz, Peter Weidner, 2005 .