Kevin T. Turner

发表

Structural design considerations for micromachined solid oxide fuel cells

V. T. Srikar, Kevin T. Turner, Tze Yung Andrew Ie, 2004 .

Models to relate wafer geometry measurements to in-plane distortion of wafers

Pradeep Vukkadala, Kevin T. Turner, Jaydeep K. Sinha, 2016 .

Predicting and correcting for image placement errors during the fabrication of EUVL masks

Roxann L. Engelstad, Jaewoong Sohn, Andrew R. Mikkelson, 2007, European Mask and Lithography Conference.

Compensating for image placement errors induced during the fabrication and chucking of EUVL masks

Roxann L. Engelstad, Jaewoong Sohn, Andrew R. Mikkelson, 2007, SPIE Photomask Technology.

Techniques to measure force uniformity of electrostatic chucks for EUV mask clamping

Jaewoong Sohn, Sathish Veeraraghavan, Kevin T. Turner, 2007 .

Electrostatic chucking of EUVL reticles

Roxann L. Engelstad, Jaewoong Sohn, Andrew R. Mikkelson, 2007, SPIE Advanced Lithography.

Measuring force uniformity during electrostatic chucking of EUVL masks

Roxann L. Engelstad, Jaewoong Sohn, Kevin T. Turner, 2006, SPIE Photomask Technology.

Monitoring process-induced overlay errors through high-resolution wafer geometry measurements

Pradeep Vukkadala, Sathish Veeraraghavan, Kevin T. Turner, 2014, Advanced Lithography.

Experimental verification of finite element model prediction of EUVL mask flatness during electrostatic chucking

Roxann L. Engelstad, Jaewoong Sohn, Andrew R. Mikkelson, 2006, SPIE Photomask Technology.

A ROUND ROBIN EXPERIMENT TO SUPPORT BOND VOID MEASUREMENT STANDARDS | NIST

Richard A. Allen, David T. Read, Kevin T. Turner, 2016 .

Effect of wafer geometry on lithography chucking processes

Kevin T. Turner, Jaydeep K. Sinha, 2015, Advanced Lithography.

Simulation of non-uniform wafer geometry and thin film residual stress on overlay errors

Kevin T. Turner, Jaydeep K. Sinha, Sathish Veeraraghaven, 2011, Advanced Lithography.

EUV mask and chuck analysis: simulation and experimentation

Roxann L. Engelstad, Jaewoong Sohn, Andrew R. Mikkelson, 2006, SPIE Advanced Lithography.

On the Validation of a Differential Variational Inequality Approach for the Dynamics of Granular Material

Dan Negrut, Kevin T. Turner, Daniel Melanz, 2010 .

Predicting the influence of trapped particles on EUVL reticle distortion during exposure chucking

Roxann L. Engelstad, Edward G. Lovell, Kevin T. Turner, 2006, SPIE Photomask Technology.

Role of wafer geometry in wafer chucking

Kevin T. Turner, Jaydeep K. Sinha, Roshita Ramkhalawon, 2013 .

Assessment of the mechanical integrity of silicon and diamond-like-carbon coated silicon atomic force microscope probes

Kevin T. Turner, Jingjing Liu, Kumar Sridharan, 2010, NanoScience + Engineering.

Status of EUVL reticle chucking

Pradeep Vukkadala, Roxann L. Engelstad, Jaewoong Sohn, 2008, European Mask and Lithography Conference.

Measuring and characterizing the nonflatness of EUVL reticles and electrostatic chucks

Pradeep Vukkadala, Roxann L. Engelstad, Jaewoong Sohn, 2007, SPIE Photomask Technology.

Effect of Inorganic Fillers in Paper on the Adhesion of Pressure-Sensitive Adhesives

Kevin T. Turner, John M. Considine, Weixu Chen, 2011 .

Effects of Thermal Aging on Mechanical Performance of Paper

Kevin T. Turner, John M. Considine, Robert E. Rowlands, 2008 .

Modeling of direct wafer bonding: effect of wafer bow and etch patterns

Kevin T. Turner, S. M. Spearing, 2002 .

Relationship between localized wafer shape changes induced by residual stress and overlay errors

Sathish Veeraraghavan, Kevin T. Turner, Jaydeep K. Sinha, 2012 .

Electrostatic chucking for extreme ultraviolet lithography: Simulations and experiments

Roxann L. Engelstad, Jaewoong Sohn, Sathish Veeraraghavan, 2006 .

Predicting distortions and overlay errors due to wafer deformation during chucking on lithography scanners

Sathish Veeraraghavan, Kevin T. Turner, Jaydeep K. Sinha, 2009 .

Shear-enhanced adhesiveless transfer printing for use in deterministic materials assembly

Huanyu Cheng, Placid Mathew Ferreira, John A. Rogers, 2011 .

Fabrication of a high frequency piezoelectric microvalve

Nesbitt W. Hagood, Kevin T. Turner, J. L. Steyn, 2004 .

Determining local residual stresses from high resolution wafer geometry measurements

Pradeep Vukkadala, Kevin T. Turner, Jaydeep K. Sinha, 2013 .

Wear biomechanics in the slicing dentition of the giant horned dinosaur Triceratops

Kevin T. Turner, Mark A. Sidebottom, Brandon A. Krick, 2015, Science Advances.

Design, fabrication, and testing of a piezoelectrically driven high flow rate micro-pump

Nesbitt W. Hagood, Yu-Hsuan Su, Laxman Saggere, 2000, ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics (IEEE Cat. No.00CH37076).

Distortion of chucked extreme ultraviolet reticles from entrapped particles

Roxann L. Engelstad, Sathish Veeraraghavan, Andrew R. Mikkelson, 2006 .

An analytical model for shear-enhanced adhesiveless transfer printing

Huanyu Cheng, John A. Rogers, Yonggang Huang, 2012 .

A High-Frequency, High-Stiffness Piezoelectric Micro-Actuator for Hydraulic Applications

Nesbitt W. Hagood, Laxman Saggere, Kevin T. Turner, 2001 .

Methods to Measure the Strength of Cell Adhesion to Substrates

Kevin T. Turner, K. Turner, Kevin V. Christ, 2010 .

Interface mechanics of adhesiveless microtransfer printing processes

John A. Rogers, Kevin T. Turner, J. Rogers, 2014 .

Mixed-mode interface toughness of wafer-level Cu–Cu bonds using asymmetric chevron test

Kevin T. Turner, Carl V. Thompson, Rajappa Tadepalli, 2008 .

Smoothly varying in‐plane stiffness heterogeneity evaluated under uniaxial tensile stress

Fabrice Pierron, Kevin T. Turner, Pascal Lava, 2017 .

Measurement of the strength and range of adhesion using atomic force microscopy

Kevin T. Turner, Yijie Jiang, K. Turner, 2016 .

Determining the Elastic Modulus of Compliant Thin Films Supported on Substrates from Flat Punch Indentation Measurements

Kevin T. Turner, John M. Considine, K. Turner, 2013 .

3D Elastomeric Scaffolds Fabricated by Casting in Micro End Milled Moulds

Kevin T. Turner, Bryce Smith, Juan F. Vivanco, 2010 .

Friction laws at the nanoscale

Kevin T. Turner, Yifei Mo, Izabela Szlufarska, 2009, Nature.

Impact of Wafer Geometry on CMP for Advanced Nodes

Pradeep Vukkadala, Kevin T. Turner, Jaydeep K. Sinha, 2011 .