G. Klusewitz
发表
G. Klusewitz,
J.M.C. Viegh,
2002,
13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259).
R. Rerick,
G. Klusewitz,
G. Klusewitz,
1996,
IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings.