Yangyao Ding

Run-to-Run Control of Thermal Atomic Layer Deposition

Panagiotis D. Christofides, Yichi Zhang, Yangyao Ding, 2020, 2020 28th Mediterranean Conference on Control and Automation (MED).

Computational fluid dynamics-based in-situ sensor analytics of direct metal laser solidification process using machine learning

Panagiotis D. Christofides, Yongjian Wang, Yichi Zhang, 2020, Comput. Chem. Eng..

Machine learning-based modeling and operation of plasma-enhanced atomic layer deposition of hafnium oxide thin films

Panagiotis D. Christofides, Yichi Zhang, Yangyao Ding, 2021, Comput. Chem. Eng..

Multiscale computational fluid dynamics modeling and reactor design of plasma-enhanced atomic layer deposition

Panagiotis D. Christofides, Yichi Zhang, Yangyao Ding, 2020, Comput. Chem. Eng..

Integration of feedback control and run-to-run control for plasma enhanced atomic layer deposition of hafnium oxide thin films

Panagiotis D. Christofides, Yangyao Ding, Sungil Yun, 2021, Comput. Chem. Eng..

Multiscale computational fluid dynamics modeling of thermal atomic layer deposition with application to chamber design

Panagiotis D. Christofides, Yangyao Ding, Yichi Zhang, 2019, Chemical Engineering Research and Design.

Microscopic modeling and optimal operation of thermal atomic layer deposition

Panagiotis D. Christofides, Yangyao Ding, Zhe Wu, 2019, Chemical Engineering Research and Design.

Microscopic modeling and optimal operation of plasma enhanced atomic layer deposition

Panagiotis D. Christofides, Yangyao Ding, Gerassimos Orkoulas, 2020 .

Integrating Feedback Control and Run-to-Run Control in Multi-Wafer Thermal Atomic Layer Deposition of Thin Films

Panagiotis D. Christofides, Yangyao Ding, Yichi Zhang, 2019, Processes.

Machine learning-based modeling and operation for ALD of SiO2 thin-films using data from a multiscale CFD simulation

Panagiotis D. Christofides, Yangyao Ding, Yi Ming Ren, 2019, Chemical Engineering Research and Design.