Hiroyasu Shichi

Developments of new concept analytical instruments for failure analyses of sub-100 nm devices

Takashi Aoyama, Yasuhiro Mitsui, Hiroshi Kakibayashi, 2001, Microelectron. Reliab..

Immediate observation of embedded structure after top-down delayering by using “Dig and See” technology for GFIS-SIM based accurate overlay metrology (Conference Presentation)

Shinichi Matsubara, Masami Ikota, Hiroyasu Shichi, 2020 .

Visualization of 3D structure of semiconductor devices by "Dig and See" using GFIS-SIM

Shinichi Matsubara, Masami Ikota, Hiroyasu Shichi, 2019, Advanced Lithography.