Sylvain Petitgrand

发表

Simultaneous mapping of phase and amplitude of MEMS vibrations by microscopic interferometry with stroboscopic illumination

Sylvain Petitgrand, Alain Bosseboeuf, 2003, SPIE Optical Metrology.

Characterization of the static and dynamic behaviour of M(O)EMS by optical techniques: status and trends

Sylvain Petitgrand, Alain Bosseboeuf, A. Bosseboeuf, 2003 .

Comparison of Techniques for Fringe Pattern Background Evaluation

Sylvain Petitgrand, A. Bosseboeuf, C. Breluzeau, 2006 .

Assessment of technology and (thermo)mechanical behaviour of MEMS devices by interference microscopy (Invited Paper)

Sylvain Petitgrand, Alain Bosseboeuf, Cedric Breluzeau, 2005, SPIE Optical Metrology.

Automated fringe-pattern extrapolation for patterned surface profiling by interference microscopy with Fourier transform analysis

Sylvain Petitgrand, Alain Bosseboeuf, Cedric Breluzeau, 2005, SPIE Optical Metrology.

Automated interferometric system for bulge and blister test measurements of micromachined membranes

Sylvain Petitgrand, Alain Bosseboeuf, Reda Yahiaoui, 2001, Lasers in Metrology and Art Conservation.

Application of the vortex transform to microscopic interferometry

Sylvain Petitgrand, Alain Bosseboeuf, Matthieu Guirardel, 2004, SPIE Photonics Europe.

Application of microscopic interferometry techniques in the MEMS field

Sylvain Petitgrand, Alain Bosseboeuf, A. Bosseboeuf, 2003, SPIE Optical Metrology.

Three-dimensional full-field dynamical characterization of micromechanical devices by stroboscopic white light scanning interferometry

Sylvain Petitgrand, Alain Bosseboeuf, Reda Yahiaoui, 2001, Lasers in Metrology and Art Conservation.

Quantitative time-averaged microscopic interferometry for micromechanical device vibration mode characterization

Sylvain Petitgrand, Alain Bosseboeuf, Reda Yahiaoui, 2001, Lasers in Metrology and Art Conservation.

3D Full field dynamical characterization of micromechanical devices by stroboscopic white light scanning interferometry

Sylvain Petitgrand, Alain Bosseboeuf, Reda Yahiaoui, 2001 .

Simultaneous mapping of out-of-plane and in-plane vibrations of MEMS with (sub)nanometer resolution

Sylvain Petitgrand, Alain Bosseboeuf, A. Bosseboeuf, 2004 .

Characterization of static and dynamic optical actuation of Al microbeams by microscopic interferometry techniques

Sylvain Petitgrand, Alain Bosseboeuf, Bérenger Courbet, 2003 .