Alain Bosseboeuf

发表

Simultaneous mapping of phase and amplitude of MEMS vibrations by microscopic interferometry with stroboscopic illumination

Sylvain Petitgrand, Alain Bosseboeuf, 2003, SPIE Optical Metrology.

An electromechanical mixer using silicon micromechanical capacitors and radio-frequency functions

Alain Bosseboeuf, Isabelle Dufour, Gaelle Bazin, 2000 .

Electromagnetic micro-device realized by electrochemical way

Emile Martincic, Elisabeth Dufour-Gergam, Alain Bosseboeuf, 2001 .

Characterization of the static and dynamic behaviour of M(O)EMS by optical techniques: status and trends

Sylvain Petitgrand, Alain Bosseboeuf, A. Bosseboeuf, 2003 .

Scanning electron microscopy for vacuum quality factor measurement of small-size MEMS resonators

Hervé Mathias, Souhil Megherbi, Alain Bosseboeuf, 2008 .

In-plane vibration measurement of microdevices by the knife-edge technique in reflection mode

Souhil Megherbi, Alain Bosseboeuf, Philippe Coste, 2006, International Conference on Vibration Measurements by Laser Techniques: Advances and Applications.

Versatile microscopic profilometer-vibrometer for static and dynamic characterization of micromechanical devices

Alain Chabrier, Alain Bosseboeuf, Philippe Coste, 1999, Industrial Lasers and Inspection.

Laser doping for microelectronics and microtechnology

Tarik Bourouina, Kuniyuki Kakushima, Elisabeth Dufour-Gergam, 2004, SPIE High-Power Laser Ablation.

Assessment of technology and (thermo)mechanical behaviour of MEMS devices by interference microscopy (Invited Paper)

Sylvain Petitgrand, Alain Bosseboeuf, Cedric Breluzeau, 2005, SPIE Optical Metrology.

Image blur analysis for the subpixel-level measurement of in-plane vibration parameters of MEMS resonators

Bertrand Zavidovique, Alain Bosseboeuf, Ha Vu Le, 2007, SPIE Optical Engineering + Applications.

Laser-induced structural or compositional modifications of Si or IV-IV surface: planarization, pulsed-laser-induced epitaxy, carbon incorporation, and chemical etching

Alain Bosseboeuf, B. Bourguignon, Jacques Boulmer, 1998, Other Conferences.

Study of subpixel image processing algorithms for MEMS in-plane vibration measurements by stroboscopic microscopy

Alain Bosseboeuf, Samia Bouchafa, Adel Hafiane, 2003, SPIE Optical Metrology.

Automated fringe-pattern extrapolation for patterned surface profiling by interference microscopy with Fourier transform analysis

Sylvain Petitgrand, Alain Bosseboeuf, Cedric Breluzeau, 2005, SPIE Optical Metrology.

Characterization of residual stress in metallic films on silicon with micromechanical devices

Alain Bosseboeuf, Gérard Coffignal, Mathilde Boutry, 1996, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

A new technique for 3D profilometry of MEMS

Alain Bosseboeuf, Igor Lyuboshenko, 2006, SPIE MOEMS-MEMS.

GaAs-based tuning fork microresonators: A first step towards a GaAs-based coriolis 3-axis Micro-Vibrating Rate Gyro (GaAs 3-axis μCVG)

Alain Bosseboeuf, O. Le Traon, O. Ducloux, 2011 .

Automated interferometric system for bulge and blister test measurements of micromachined membranes

Sylvain Petitgrand, Alain Bosseboeuf, Reda Yahiaoui, 2001, Lasers in Metrology and Art Conservation.

Application of the vortex transform to microscopic interferometry

Sylvain Petitgrand, Alain Bosseboeuf, Matthieu Guirardel, 2004, SPIE Photonics Europe.

Application of microscopic interferometry techniques in the MEMS field

Sylvain Petitgrand, Alain Bosseboeuf, A. Bosseboeuf, 2003, SPIE Optical Metrology.

Three-dimensional full-field dynamical characterization of micromechanical devices by stroboscopic white light scanning interferometry

Sylvain Petitgrand, Alain Bosseboeuf, Reda Yahiaoui, 2001, Lasers in Metrology and Art Conservation.

Experimental measurements and behavioral modeling of an electrostatically actuated bi-axial micromirror

Pierre Cusin, Hervé Mathias, Souhil Megherbi, 2005 .

Quantitative time-averaged microscopic interferometry for micromechanical device vibration mode characterization

Sylvain Petitgrand, Alain Bosseboeuf, Reda Yahiaoui, 2001, Lasers in Metrology and Art Conservation.

3D Full field dynamical characterization of micromechanical devices by stroboscopic white light scanning interferometry

Sylvain Petitgrand, Alain Bosseboeuf, Reda Yahiaoui, 2001 .

Gold metallizations for eutectic bonding of silicon wafers

Alain Bosseboeuf, Benoit Belier, C. Clerc, 2006 .

Simultaneous mapping of out-of-plane and in-plane vibrations of MEMS with (sub)nanometer resolution

Sylvain Petitgrand, Alain Bosseboeuf, A. Bosseboeuf, 2004 .

Vacuum measurement in wafer level encapsulations by interference microscopy

Alain Bosseboeuf, David Bouville, J.-P. Grandchamp, 2006 .

Characterization of static and dynamic optical actuation of Al microbeams by microscopic interferometry techniques

Sylvain Petitgrand, Alain Bosseboeuf, A. Bosseboeuf, 2003 .

Micro Pirani vacuum gauges manufactured by a film transfer process

Emile Martincic, Elisabeth Dufour-Gergam, Alain Bosseboeuf, 2010 .

Silicon full wafer bonding with atomic layer deposited titanium dioxide and aluminum oxide intermediate films

Hannu Kattelus, Hiroyuki Fujita, Alain Bosseboeuf, 2012 .

Accuracy of thin film stress measurements with c-Si microbeams fabricated by dry etching

Tarik Bourouina, Alain Bosseboeuf, J.-P. Grandchamp, 1997 .

Permalloy electroplating through photoresist molds

Tarik Bourouina, Elisabeth Dufour-Gergam, Alain Bosseboeuf, 1999 .

Thermal and electromechanical characterization of top-down fabricated p-type silicon nanowires

Arnaud Walther, Alain Bosseboeuf, Philippe Coste, 2015 .

Characterization of W Films on Si and SiO2/Si Substrates by X-Ray Diffraction, AFM and Blister Test Adhesion Measurements

Tarik Bourouina, Alain Bosseboeuf, Daniel Bouchier, 1997 .

Experimental Techniques for Damping Characterization of Micro and Nanostructures

Alain Bosseboeuf, Hervé Mathias, 2008 .

Experimental Measurements and Behavioral Modeling of an Electrostatically Actuated Bi-Axial Micromirror

Souhil Megherbi, Alain Bosseboeuf, Gerold Schropfer, 2006 .